Effects of post annealing on removal of defect states in silicon oxynitride films grown by oxidation of silicon substrates nitrided in inductively coupled nitrogen plasma

Ultra thin (5 nm) silicon oxynitride (SiON) films were fabricated at a low temperature using nitrogen plasma generated by an inductively coupled plasma system. Effects of post-metalization annealing (PMA) of Al/SiON/Si MOS structure on the electrical properties of the SiON films were studied and correlations between the charge trapping states and the leakage current were established. Positive charge trapping by interface states generated by plasma damage was characterized by the hysteresis in high-frequency capacitance-voltage (C-V) characteristics. Hysteresis was observed to be completely removed by PMA while interface state density at the Si mid band gap reduced from 2.2×10¹³ to 3.7×10¹¹/eV/cm² and the oxide fixed charge density changed from 3.3×10¹² to −4×10¹¹/cm². The leakage current also decreased significantly, by more than two orders of magnitude, with PMA. The analysis of the leakage current using trap assisted tunneling (TAT) mechanism indicated that with PMA, the trap energy level in the SiON film becomes shallower from 1.3 to 0.7 eV. The positive trapped charges were observed to be annihilated by PMA and the trapping sites became neutral trap centers in the SiON film. This could lead to the reduction in the leakage current component given rise to by TAT.     

线性调频相干激光雷达的信号处理

分析了相干激光雷达线性调频脉冲的产生及其信号处理过程，讨论了该雷达信号体制的处理方法和结果。计算了采用匹配滤波和加权处理结果，对于1MHz／μs的调制速率信号的结果表明，激光相干雷达的测速和测距精度分别可达0.04m／s和0．57m.     

一种实时心电图数据压缩算法

提出了一种实时心电图ＥＣＧ数据压缩算法。它是将自适应变门限算法与转折点算法相结合。自适应变门限算法是对ＡＺＴＥＣ算法的改进．它计算ＥＣＧ信号的几个统计参数来确定可变门限值。转折点算法是分析采样点的趋势并只存储每对连续的采样点中的一个。它保留信号的斜坡标志发生变化的峰点和谷点。本文算法兼有这两种算法的优点。这种算法在较高压缩比的情况下重建心电图信号失真较小．     

子波变换理论及其在信号处理中的应用

子波分析的形成是傅里叶分析发展史上里程碑式的进展，子波分析优于傅里叶交换的地方在于它在时域和频域同时具有良好的局部化性质，从而可以把分析的重点聚焦到任意的细节，被人们誉为数学显微镜，成为近年来在工具和方法上的重大突破。本文将子波理论中的主要定理、结论、变换特性和一些重要概念加以综述，以促进子波理论的应用。本文的重点在于介绍多分辨率分析和子波分析及其实现、子波变换及其算法、子波和滤波器组等的重要内容，并介绍其在信号处理中的应用及研究动态。     

用强度系列成象法获取或显示高动态范围图象

提出一种适合于高动态范围图象的获取和显示的强度系列成象法。改变输入图象的强度，微机控制的图象采集系统进行记录得到一组磁盘文件，形成强度图象系列。基于记录的系列图象，可以进行信息提取、变换和显示等操作。基于获得的图象系列，提出一种剪贴操作进行快速的非线性图象变换。给出对光学功率谱处理的一个实例，它相当于进行锯齿形的非线性变换。     

Transputer在高速雷达视频回波采集系统中的应用

介绍以ＴｒａｎｓｐｕｔｅｒＴ４２５单片高速并行计算机为中心控制环境，与高速Ａ／Ｄ（３５ＭＨｚ，８ｂｉｔ相结合构成的实时高速雷达回波采集系统。该系统的特点是：采集速度高，存贮量大；利用标准的Ｔｒａｎｓｐｕｔｅｒ链路实时完成处理器间的数据传输和通讯；系统采用并行Ｏｃｃａｍ语言编程。这样既充分发挥处理器的并行功能，又使数据采集和数据处理同步进行，这在实时信号采集与处理系统中具有特别重要的意义。     

Qualitative representation of spatial knowledge in two-dimensional space

Various relation-based systems, concerned with the qualitative representation and processing of spatial knowledge, have been developed in numerous application domains. In this article, we identify the common concepts underlying qualitative spatial knowledge representation, we compare the representational properties of the different systems, and we outline the computational tasks involved in relation-based spatial information processing. We also describesymbolic spatial indexes, relation-based structures that combine several ideas in spatial knowledge representation. A symbolic spatial index is an array that preserves only a set of spatial relations among distinct objects in an image, called the modeling space; the index array discards information, such as shape and size of objects, and irrelevant spatial relations. The construction of a symbolic spatial index from an input image can be thought of as a transformation that keeps only a set of representative points needed to define the relations of the modeling space. By keeping the relative arrangements of the representative points in symbolic spatial indexes and discarding all other points, we maintain enough information to answer queries regarding the spatial relations of the modeling space without the need to access the initial image or an object database. Symbolic spatial indexes can be used to solve problems involving route planning, composition of spatial relations, and update operations.     

A semantic modeling approach for image retrieval by content

We introduce a semantic data model to capture the hierarchical, spatial, temporal, and evolutionary semantics of images in pictorial databases. This model mimics the user's conceptual view of the image content, providing the framework and guidelines for preprocessing to extract image features. Based on the model constructs, a spatial evolutionary query language (SEQL), which provides direct image object manipulation capabilities, is presented. With semantic information captured in the model, spatial evolutionary queries are answered efficiently. Using an object-oriented platform, a prototype medical-image management system was implemented at UCLA to demonstrate the feasibility of the proposed approach.     

弹载红外图象处理器中多CPU之间通信方法的研究

弹载红外图象处理器是一个复杂的实时红外图象处理系统。由于它的计算量很大，实时性很强，单ＣＰＵ已经不可能完成如此繁重的任务。本文分析了弹载红外图象处理器中多ＣＰＵ之间通信的几种方法。在分析几种通信方法的原理和各自的优缺点之后，提出了弹载红外图象处理器中多ＣＰＵ之间通信应采用双口ＲＡＭ作共享存储器的并行通信方法，我们所设计的系统中均采用这种方法。实验证明这种方法的数据信息通信具有很高的灵活性和可靠性，完全满足弹载红外图象处理器中多ＣＰＵ之间通信的要求。     

绝缘涂敷制件的加工工艺研究与应用

主要论述了电工绝缘粉末的性能及其在高压电器设备应用中的有关试验项目。